High-range laser light bandwidth measurement and tuning

Kevin O'Brien; Rui Jiang; Nora Han; Efrain Figueroa; Raj Rao; Robert J. Rafac

doi:10.1117/12.881167

22 March 2011 High-range laser light bandwidth measurement and tuning

Kevin O'Brien, Rui Jiang, Nora Han, Efrain Figueroa, Raj Rao, Robert J. Rafac

Proceedings Volume 7973, Optical Microlithography XXIV; 797326 (2011) https://doi.org/10.1117/12.881167
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

High performance lithography is increasingly demanding light sources to deliver laser light over a much larger range of stabilized bandwidths. The applications range from improved optical proximity correction (OPC) to the high-speed printing of vias and contact holes, through a process called focus drilling. Several advances in light source technology must integrate to provide the improved bandwidth performance required by the industry. This paper will outline three of the core technologies developed by Cymer and integrated into its most advanced XLA^TM and XLR^TM series light sources to meet this need. Novel improvements in line narrowing offer the actuation necessary to tune the bandwidth over the large range. Advanced bandwidth metrology yields accurate measurements of the bandwidth over the wide range. And new controls and feedback algorithms provide the integration to stabilize the bandwidth to the desired target. The result provides laser light bandwidths that can be tuned to and accurately stabilized at any spectral E95 target from 0.3 pm to 1.6 pm, while maintaining all other laser performance parameters. The feature is called focus drilling. Focus drilling extends the utility of Cymer XLA and XLR lasers by adding more flexibility to the light source, allowing the end-user chipmaker to select the exact properties of the laser light necessary for a wider range of process steps. The article will discuss the above technologies and emphasize their important aspects. It will also highlight some of the key performance aspects using data from Cymer's testing. Some of the design features and trade-offs will be provided, and a few of the relevant metrics will be presented and justified. Finally, potential future improvements to the technology will be presented.

Citation Download Citation

Kevin O'Brien, Rui Jiang, Nora Han, Efrain Figueroa, Raj Rao, and Robert J. Rafac "High-range laser light bandwidth measurement and tuning", Proc. SPIE 7973, Optical Microlithography XXIV, 797326 (22 March 2011); https://doi.org/10.1117/12.881167

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