Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material

A. A. Vasiliev; A. S. Lipilin; A. S. Lagutin; A. V. Pisliakov; N. P. Zaretskiy; N. N. Samotaev; A. V. Sokolov

doi:10.1117/12.887500

5 May 2011 Gas sensors based on MEMS structures made of ceramic ZrO₂/Y₂O₃ material

A. A. Vasiliev, A. S. Lipilin, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, A. V. Sokolov

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660N (2011) https://doi.org/10.1117/12.887500
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

The methods of the fabrication of MEMS platforms based on yttria stabilized zirconia (YSZ) and alumina membranes for gas sensors used in harsh environmental conditions are described. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 450°C down to ~75 mW at continuous and down to ~ 1 mW at pulse heating of gas sensor.

Citation Download Citation

A. A. Vasiliev, A. S. Lipilin, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, and A. V. Sokolov "Gas sensors based on MEMS structures made of ceramic ZrO₂/Y₂O₃ material", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660N (5 May 2011); https://doi.org/10.1117/12.887500

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