Hardware implementation of an electrostatic MEMS-actuator linearization

F. Mair; M. Egretzberger; A. Kugi

doi:10.1117/12.886793

5 May 2011 Hardware implementation of an electrostatic MEMS-actuator linearization

F. Mair, M. Egretzberger, A. Kugi

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806610 (2011) https://doi.org/10.1117/12.886793
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

In this paper, an electrostatic actuator linearization will be introduced, which is based on an existing hardware-efficient iterative square root algorithm. The algorithm is solely based on add and shift operations while just needing n/2 iterations for an n bit wide input signal. As a practical example, the nonlinear input transformation will be utilized for the design of the primary mode controller of a capacitive MEMS gyroscope and an implementation of the algorithm in the Verilog hardware description language will be instantiated. Finally, measurement results will validate the feasibility of the presented control concept and its hardware implementation.

Citation Download Citation

F. Mair, M. Egretzberger, and A. Kugi "Hardware implementation of an electrostatic MEMS-actuator linearization", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806610 (5 May 2011); https://doi.org/10.1117/12.886793

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