Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology

F. Solazzi; J. Iannacci; A. Faes; F. Giacomozzi; B. Margesin; A. Tazzoli; G. Meneghesso

doi:10.1117/12.887559

5 May 2011 Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology

F. Solazzi, J. Iannacci, A. Faes, F. Giacomozzi, B. Margesin, A. Tazzoli, G. Meneghesso

Author Affiliations +

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806614 (2011) https://doi.org/10.1117/12.887559
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

This work reports the analysis, modeling and characterization of an electrostatic vibration-to-electric energy scavenger. The scavenger was manufactured by the FBK in-house foundry by using a MEMS (Micro-Electro- Mechanical System) surface micro-machining technology. Extensive finite element analyses (FEA) were performed for the compact modeling of the device and presented here. The scavenger was characterized by means of dynamical measurements as a further validation of the FE model. A random vibration analysis is also utilized for the emulation of the real device operating conditions.

Citation Download Citation

F. Solazzi, J. Iannacci, A. Faes, F. Giacomozzi, B. Margesin, A. Tazzoli, and G. Meneghesso "Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806614 (5 May 2011); https://doi.org/10.1117/12.887559

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