High-throughput beam splitters for high-order harmonics in soft-x-ray region

Masatoshi Hatayama; Eiji J. Takahashi; Hisataka Takenaka; Eric M. Gullikson; Katsumi Midorikawa

doi:10.1117/12.887561

18 May 2011 High-throughput beam splitters for high-order harmonics in soft-x-ray region

Masatoshi Hatayama, Eiji J. Takahashi, Hisataka Takenaka, Eric M. Gullikson, Katsumi Midorikawa

Proceedings Volume 8077, Damage to VUV, EUV, and X-ray Optics III; 80770T (2011) https://doi.org/10.1117/12.887561
Event: SPIE Optics + Optoelectronics, 2011, Prague, Czech Republic

Abstract

We demonstrated two high-throughput beam splitters for high-order harmonics in soft-x-ray region, an extremely-flat free-standing thin-film filter and a high-damage-threshold reflective beam splitter. The Al thin-film filter, which is coated with a SiC film to increase its oxidation tolerance, has a transmittance of 29% at 30 nm and the Si plate beam splitter set at Brewster's angle with respect to the pump wavelength has a reflectivity of 56% at 30 nm.

Citation Download Citation

Masatoshi Hatayama, Eiji J. Takahashi, Hisataka Takenaka, Eric M. Gullikson, and Katsumi Midorikawa "High-throughput beam splitters for high-order harmonics in soft-x-ray region", Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770T (18 May 2011); https://doi.org/10.1117/12.887561

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