Fringe pattern characterization by OPD analysis in a lateral shearing interferometric profilometer

María Frade; José María Enguita; Ignacio Álvarez; Silvia Rodríguez-Jiménez

doi:10.1117/12.889267

27 May 2011 Fringe pattern characterization by OPD analysis in a lateral shearing interferometric profilometer

María Frade, José María Enguita, Ignacio Álvarez, Silvia Rodríguez-Jiménez

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821S (2011) https://doi.org/10.1117/12.889267
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

A common-path interferometric profilometer using a Savart plate as a lateral shearer has been successfully tested under harsh environmental conditions to measure the shape of a surface, detecting defects and characterizing surface properties. The whole profile is obtained from a single image and its depth sensitivity is easily scalable, making this technique suitable for many different applications. Although this system has been successfully used for surface inspection and defect detection, some behaviors cannot be explained by the usual simple model for fringe formation, which, amongst other things, considers normal incidence of the incoming rays into the Savart plate. These deviations from the ideal case are more noticeable for high resolutions from short distances. This paper studies the formation of the fringe pattern, which is crucial for understanding the behavior of the system and proper calibration.

Citation Download Citation

María Frade, José María Enguita, Ignacio Álvarez, and Silvia Rodríguez-Jiménez "Fringe pattern characterization by OPD analysis in a lateral shearing interferometric profilometer", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821S (27 May 2011); https://doi.org/10.1117/12.889267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available