Laser testing of an Iris AO dielectric-coated segmented MEMS DM

Michael A. Helmbrecht; Min He; Andrew P. Norton; Donald T. Gavel

doi:10.1117/12.894984

22 September 2011 Laser testing of an Iris AO dielectric-coated segmented MEMS DM

Michael A. Helmbrecht, Min He, Andrew P. Norton, Donald T. Gavel

Proceedings Volume 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems; 81650U (2011) https://doi.org/10.1117/12.894984
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Iris AO has been developing dielectric-coated segmented MEMS deformable mirrors (DM) for use in laser applications that range from 355-1540 nm. In order to mitigate deformation from residual stress in the thick dielectric coatings, a stress-compensation layer has been added to the underside if the DM segments. This paper describes fabrication results of DMs with high reflectance dielectric coatings for 532 nm, 1064 nm, and 1540 nm. Additionally, a DM with a 532 nm coating has been tested with a 2 W, 532 nm CW laser. Laser testing shows the DM can handle 300 W/cm² with off-theshelf packaging. Projections show that with good heat sinking, the same DM can handle laser power densities of 2800 W/cm². The coatings showed no signs of damage after exposure to a w₀=25 μm beam with a power density of 205 kW/cm² for 105 minutes at the center of a segment and at segment edges exposed to 180 kW/cm² for 45 minutes.

Citation Download Citation

Michael A. Helmbrecht, Min He, Andrew P. Norton, and Donald T. Gavel "Laser testing of an Iris AO dielectric-coated segmented MEMS DM", Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650U (22 September 2011); https://doi.org/10.1117/12.894984

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