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Gravitational wave detectors such as Virgo and LIGO use long-baseline Michelson interferometers with high
finesse Fabry-Perrot cavity in the arms. The symmetry of these cavities is essential to prevent the interferometer
from sensitivity to laser fluctuations. For this purpose the difference between the transmissions of the two input
mirrors has to be minimized. Advanced LIGO, the upgrade of LIGO, plans a transmission matching between the
two input mirrors as high as 99%. A small deviation in the process fabrication from run to run might induce
transmission mismatch larger than 1%. Consequently, the two input mirrors have to be coated during the same
coating run. That requires ability to deposit the reflective coating, based on a stack of titanium doped tantala
(Ti:Ta2O5) layers and silica layers, uniformly over a 800 mm diameter aperture. This paper presents the study to
improve the thickness uniformity of a reflective coating and the preliminary results achieved on two Ø350mm
substrates coated in the run.
B. Sassolas,Q. Benoît,R. Flaminio,D. Forest,J. Franc,M. Galimberti,A. Lacoudre,C. Michel,J.-L. Montorio,N. Morgado, andL. Pinard
"Thickness uniformity improvement for the twin mirrors used in advanced gravitational wave detectors", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681Q (3 October 2011); https://doi.org/10.1117/12.896318
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B. Sassolas, Q. Benoît, R. Flaminio, D. Forest, J. Franc, M. Galimberti, A. Lacoudre, C. Michel, J.-L. Montorio, N. Morgado, L. Pinard, "Thickness uniformity improvement for the twin mirrors used in advanced gravitational wave detectors," Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681Q (3 October 2011); https://doi.org/10.1117/12.896318