Development of electric power generation system for bio-MEMS device by using a new bio-compatible piezoelectric material MgSiO[sub]3[/sub]

Hideyuki Kuribayashi; Eiji Nakamachi; Yusuke Morita

doi:10.1117/12.903194

23 December 2011 Development of electric power generation system for bio-MEMS device by using a new bio-compatible piezoelectric material MgSiO₃

Hideyuki Kuribayashi, Eiji Nakamachi, Yusuke Morita

Author Affiliations +

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82042Z (2011) https://doi.org/10.1117/12.903194
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

In this study, the energy harvester for Bio-MEMS device using a new bio-compatible piezoelectric thin film was developed. At first, we generated MgSiO₃ (MSO) thin film on Ti and Cu buffer layers and Si (100) substrate by using RF-magnetron sputtering procedure. We measured the crystallography orientation by employing the X-ray diffractometer and the piezoelectric properties with the ferroelectric measurement system. We confirmed that MgSiO₃(111) crystal had been generated on Cu/Ti/Si (100) substrate. Its displacement-voltage curve indicated the typical butterfly type hysteresis loop, which meant MgSiO₃(111) thin film had piezoelectricity. The piezoelectric strain constant d33 was calculated by adopting the displacement-voltage curve, such as 181.5 pm/V. Further, the polarization properties of the MSO thin films were measured. The spontaneous polarization and remnant polarization are 0.89 μC/cm² and 1.06 μC/cm². Then, we adopted interdigitated-shape electrodes on MSO film in order to generate the d33 mode of the piezoelectric transducer. Accordingly, the generated voltage was estimated as 3.19 V by employing finite element method, ANSYS. We fabricated a monomorph type MSO piezoelectric cantilever for harvesting the vibration energy by employing the semiconductor process technologies. At last we will show results of performance assessment of our MSO piezoelectric harvester.

Citation Download Citation

Hideyuki Kuribayashi, Eiji Nakamachi, and Yusuke Morita "Development of electric power generation system for bio-MEMS device by using a new bio-compatible piezoelectric material MgSiO₃", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82042Z (23 December 2011); https://doi.org/10.1117/12.903194

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