Paper
1 February 2012 Optofluidics: waveguides and devices
Genni Testa, Yujian Huang, Luigi Zeni, Pasqualina M. Sarro, Romeo Bernini
Author Affiliations +
Abstract
In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used in order to realize complex optofluidic devices like Mach-Zehnder interferometers and ring resonators. The advantage of using optofluidic waveguide results in very compact devices with a total length of 2.5 mm and a required liquid volume less then 0.16nl.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Genni Testa, Yujian Huang, Luigi Zeni, Pasqualina M. Sarro, and Romeo Bernini "Optofluidics: waveguides and devices", Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 826415 (1 February 2012); https://doi.org/10.1117/12.908683
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KEYWORDS
Waveguides

Silicon

Liquids

Resonators

Microfluidics

Semiconducting wafers

Refractive index

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