Study on platinum thermal sensitive films deposited using magnetic sputtering

Changlong Cai; Weiguo Liu; Shun Zhou; Yujia Zhai

doi:10.1117/12.973727

15 October 2012 Study on platinum thermal sensitive films deposited using magnetic sputtering

Changlong Cai, Weiguo Liu, Shun Zhou, Yujia Zhai

Proceedings Volume 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy; 841916 (2012) https://doi.org/10.1117/12.973727
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The infrared imaging detecting technology has broad application prospects in military and civilian fields. The bolometer is one of mainstream uncooled infrared detectors, because it has many advantages, for example, light weight, wide dynamic range, excellent response linearity, and without refrigeration and chopper which leads to low manufacturing cost. In many infrared detecting sensitive materials, Pt films have wider linear range, lower noise, and compatibility with silicon integrated process excellently. In this paper, Pt sensitive films were deposited by means of magnetron sputtering, the preparation process of Pt films for the infrared imaging detecting unit was studied, the temperature coefficient of resistance (TCR) of Pt films can be improved by vacuum annealing to achieve 1.737 ‰/K. The micro-structure and micro-fabrication process of infrared imaging detecting unit based on Pt films were designed, and the heating character of infrared imaging detecting unit based on Pt films was measured using I-V character testing system. Testing results shown that, the properties of fabricated infrared thermal imaging detecting unit based on Pt films were better, Its TCR is about 1.64 ‰/K, and its thermal response is better.

Citation Download Citation

Changlong Cai, Weiguo Liu, Shun Zhou, and Yujia Zhai "Study on platinum thermal sensitive films deposited using magnetic sputtering", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 841916 (15 October 2012); https://doi.org/10.1117/12.973727

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Platinum

Resistance

Thermography

Infrared imaging

Annealing

Infrared detectors

Infrared radiation

Show All Keywords

Keywords/Phrases

Search In:

Publication Years