Electrical characterization of &#947;-Al2O3 thin film parallel plate capacitive sensor for trace moisture detection

Lokesh Kumar; Shailesh Kumar; S. A. Khan; Tariqul Islam

doi:10.1117/12.926779

15 October 2012 Electrical characterization of γ-Al2O3 thin film parallel plate capacitive sensor for trace moisture detection

Lokesh Kumar, Shailesh Kumar, S. A. Khan, Tariqul Islam

Author Affiliations +

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85490X (2012) https://doi.org/10.1117/12.926779
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

A moisture sensor was fabricated based on porous thin film of γ-Al₂O₃ formed between the parallel gold electrodes. The sensor works on capacitive technique. The sensing film was fabricated by dipcoating of aluminium hydroxide sol solution obtained from the sol-gel method. The porous structure of the film of γ-Al₂O₃ phase was obtained by sintering the film at 450 °C for 1 h. The electrical parameters of the sensor have been determined by Agilent 4294A impedance analyzer. The sensor so obtained is found to be sensitive in moisture range 100-600 ppmV. The response time of the sensor in ppmV range moisture is very low ~ 24 s and recovery time is ~ 37 s.

Citation Download Citation

Lokesh Kumar, Shailesh Kumar, S. A. Khan, and Tariqul Islam "Electrical characterization of γ-Al2O3 thin film parallel plate capacitive sensor for trace moisture detection", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85490X (15 October 2012); https://doi.org/10.1117/12.926779

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