Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining

Mahanth Prasad; R. P. Yadav; V. Sahula; V. K. Khanna

doi:10.1117/12.925318

15 October 2012 Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining

Mahanth Prasad, R. P. Yadav, V. Sahula, V. K. Khanna

Author Affiliations +

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85491C (2012) https://doi.org/10.1117/12.925318
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing application. A platinum resistor of 52 Ω has been designed and simulated on a 0.3 micron thick SiO₂ suspended membrane of size 40 × 40 μm2 using ANSYS. The SiO₂ membrane of size 40 × 40 μμm₂ and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100< orientation P-type silicon using 25% tetra methyl ammonium hydroxide (TMAH) solution. The simulated temperature and transit time response of microhotplate were obtained as 600.5 °C and 0.2 ms respectively at 4.8 mW power consumption.

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Mahanth Prasad, R. P. Yadav, V. Sahula, and V. K. Khanna "Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491C (15 October 2012); https://doi.org/10.1117/12.925318

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