Position sensing and tracking with quasistatic MEMS mirrors

S. Richter; M. Stutz; A. Gratzke; Y. Schleitzer; G. Krampert; F. Hoeller; U. Wolf; L. Riedel; D. Doering

doi:10.1117/12.2009439

13 March 2013 Position sensing and tracking with quasistatic MEMS mirrors

S. Richter, M. Stutz, A. Gratzke, Y. Schleitzer, G. Krampert, F. Hoeller, U. Wolf, L. Riedel, D. Doering

Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 86160D (2013) https://doi.org/10.1117/12.2009439
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We report on a position sensing system for quasistatic MEMS mirrors using a point source LED imaged onto the backside of the mirror. The position signal is detected by a 4-quadrant-diode and can be used for digital closed-loop control. The resulting resolution is about 13 bit at a sampling frequency of 500 ksps. The whole detection system is integrated in a package enclosing the MEMS mirror, the optical beam path as well as the amplifier circuit of the 4-quadrant-diode. Based on similar control principles, a laser steering system for searching and tracking of moving objects, marked by retro-reflectors, will be presented. During an initial search, the laser steering system identifies objects by their initial position within a detection range between 1.5 m and 5 m distance and a maximum detection angle between 20 degrees and 72 degrees. The system follows the detected object on random trajectories by minimizing the zero-position error of the back reflected beam on a 4- quadrant-diode. Angular velocities of more than 100 degrees per arcsec have been measured.

Citation Download Citation

S. Richter, M. Stutz, A. Gratzke, Y. Schleitzer, G. Krampert, F. Hoeller, U. Wolf, L. Riedel, and D. Doering "Position sensing and tracking with quasistatic MEMS mirrors", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160D (13 March 2013); https://doi.org/10.1117/12.2009439

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