A new fabrication method for nano-gratings based on the high flexibility of PDMS

Min Cui; Yong Zhang; Binzhen Zhang; Wanjun Wang

doi:10.1117/12.2008389

13 March 2013 A new fabrication method for nano-gratings based on the high flexibility of PDMS

Min Cui, Yong Zhang, Binzhen Zhang, Wanjun Wang

Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 86160Y (2013) https://doi.org/10.1117/12.2008389
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

The nano-gratings are widely used in the optical measurement, integrated optics, optical information processing and other fields. It has been prepared by using electron beam lithography, etching, electroplating, nano imprinting, and LIGA technologies. In general, the fabrications of nano-grating require expensive and sophisticated equipment. The fabrication procedures involved are often complicated, therefore resulting in high cost and long production cycles. We report a new technology to fabricate nano-grating with much lower-cost. The technology is based on utilizing the high flexibility of PDMS and the nano-molding technology. Using this technology, nano-gratings can be fabricated in low-cost and no expensive or high precision equipment is needed. Because of the excellent replication property of PDMS molds, large number of gratings can be made with a single master mold.

Citation Download Citation

Min Cui, Yong Zhang, Binzhen Zhang, and Wanjun Wang "A new fabrication method for nano-gratings based on the high flexibility of PDMS", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160Y (13 March 2013); https://doi.org/10.1117/12.2008389

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