Study of EUV and x-ray radiation hardness of silicon photodiodes

Vladimir V. Zabrodsky; Pavel Aruev; Vladimir V. Filimonov; Nikolay A. Sobolev; Evgeniy V. Sherstnev; Viktor P. Belik; Anton D. Nikolenko; Denis V. Ivlyushkin; Valery F. Pindyurin; Nikita S. Shadrin; Artem E. Soldatov; Mikhail R. Mashkovtsev

doi:10.1117/12.2017478

3 May 2013 Study of EUV and x-ray radiation hardness of silicon photodiodes

Vladimir V. Zabrodsky, Pavel Aruev, Vladimir V. Filimonov, Nikolay A. Sobolev, Evgeniy V. Sherstnev, Viktor P. Belik, Anton D. Nikolenko, Denis V. Ivlyushkin, Valery F. Pindyurin, Nikita S. Shadrin, Artem E. Soldatov, Mikhail R. Mashkovtsev

Author Affiliations +

Proceedings Volume 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III; 87770R (2013) https://doi.org/10.1117/12.2017478
Event: SPIE Optics + Optoelectronics, 2013, Prague, Czech Republic

Abstract

This work presents the results of long-term observation of the silicon photodiodes spatial profile response and the silicon photodiodes dark current after their exposure to 10.2 eV quanta and in the spectral range of 150–300 eV. Exposure of the photodiodes to quanta of an energy of 10.2 eV was repeated. Several other photodiodes have been irradiated in the spectral range of 700-1800 eV with a dose of 8 J/cm². The spatial profile of the irradiated photodiodes was studied with 3.49 eV, 10.2 eV and 100 eV quanta. The effect of the recovery of the response spatial profile has been proved for the p⁺-n diode. An additional useful method of visualization of irradiated photodiode area is also presented.

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Vladimir V. Zabrodsky, Pavel Aruev, Vladimir V. Filimonov, Nikolay A. Sobolev, Evgeniy V. Sherstnev, Viktor P. Belik, Anton D. Nikolenko, Denis V. Ivlyushkin, Valery F. Pindyurin, Nikita S. Shadrin, Artem E. Soldatov, and Mikhail R. Mashkovtsev "Study of EUV and x-ray radiation hardness of silicon photodiodes", Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87770R (3 May 2013); https://doi.org/10.1117/12.2017478

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