Laser writing of periodic nano-structures on solid surfaces

Jan-Hendrik Klein-Wiele; Jozsef Bekesi; Jürgen Ihlemann; Peter Simon

doi:10.1117/12.2011128

16 May 2013 Laser writing of periodic nano-structures on solid surfaces

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Jürgen Ihlemann, Peter Simon

Proceedings Volume 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012); 87962H (2013) https://doi.org/10.1117/12.2011128
Event: 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 2012, Xi'an, Shaanxi, China

Abstract

Short und ultrashort pulse UV laser processing of solid surfaces with sub-micron precision is demonstrated. The combination of a short laser wavelength providing strong absorption and high optical resolution and a short pulse duration minimizing heat affected zones enables ultra precise patterns on any solid material. High speed is achieved using parallel processing. Periodic patterns are fabricated utilizing various optimized beam delivery concepts like multilevel diffractive optical elements, phase controlled interference, proximity phase mask method, and two grating interferometer. The respective advantages and the fields of application are discussed.

Citation Download Citation

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Jürgen Ihlemann, and Peter Simon "Laser writing of periodic nano-structures on solid surfaces", Proc. SPIE 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 87962H (16 May 2013); https://doi.org/10.1117/12.2011128

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