Signal detection and processing system for three-dimensional imaging of nonconductive surfaces in SEM

W. Slówko; M. Krysztof

doi:10.1117/12.2030763

25 July 2013 Signal detection and processing system for three-dimensional imaging of nonconductive surfaces in SEM

W. Slówko, M. Krysztof

Proceedings Volume 8902, Electron Technology Conference 2013; 890229 (2013) https://doi.org/10.1117/12.2030763
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

The three-dimensional imaging system has been developed in the form of an attachment to a SEM, which consists of a combined directional electron detector, a frame-grabber and a PC-based processing unit. The detector head is integrated with the intermediate vacuum system to separate the sample chamber allowing gas pressure over 10 hPa and the electron optical column where high vacuum must be maintained. Quantitative information about the surface topography is obtained by digital processing of four input images acquired from four electron detectors. The multi-detector system developed by authors comprises two quadruple backscattered electron detectors (of the semiconductor and ionisation types) and an ionisation secondary electron one. The semiconductor detector is dedicated for imaging of nonconductive surfaces while the ionisation one can be also used for wet or even semiliquid samples.

Citation Download Citation

W. Slówko and M. Krysztof "Signal detection and processing system for three-dimensional imaging of nonconductive surfaces in SEM", Proc. SPIE 8902, Electron Technology Conference 2013, 890229 (25 July 2013); https://doi.org/10.1117/12.2030763

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