Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography

W. Li; D. Patel; C. S. Menoni; A. Stein; W. Chao; E. Anderson; M. C. Marconi

doi:10.1117/12.2041688

7 March 2014 Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography

W. Li, D. Patel, C. S. Menoni, A. Stein, W. Chao, E. Anderson, M. C. Marconi

Proceedings Volume 8973, Micromachining and Microfabrication Process Technology XIX; 89730D (2014) https://doi.org/10.1117/12.2041688
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

A table top nanofabrication system which combines the classic Talbot imaging effect and a compact table top soft-x ray laser is described in this paper. Periodic nanostructures on millimeter square are fabricated using this robust, simple and defect tolerant fabrication method. Talbot lithography allows for a complete coherent extreme ultraviolet lithography process in a compact table top system. Double exposure allowed for the reduction of the feature sizes.

Citation Download Citation

W. Li, D. Patel, C. S. Menoni, A. Stein, W. Chao, E. Anderson, and M. C. Marconi "Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730D (7 March 2014); https://doi.org/10.1117/12.2041688

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