Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling

Sandipan Maity; Shuangqin Liu; Stephane Rouvillois; Gunar Lorenz; Mattan Kamon

doi:10.1117/12.2041067

7 March 2014 Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling

Sandipan Maity, Shuangqin Liu, Stephane Rouvillois, Gunar Lorenz, Mattan Kamon

Author Affiliations +

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770B (2014) https://doi.org/10.1117/12.2041067
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

A new hybrid 3D finite-element/behavioral-modeling approach is presented that can be used to accurately predict the nonlinear dynamics (parametric resonance) in electrostatically driven 2D resonant MEMS scanning mirrors. We demonstrate new levels of accuracy and speed for thick SOI scanning mirrors with large scanning angles and validate the modeling approach against measurement on a previously fabricated scanning mirror. The modeling approach is fast and treats the design parameters as variables thus enabling rapid design iterations, automatic sensitivity and statistical yield analyses, and integration with system and circuit simulators for coupled MEMS-IC cosimulation.

Citation Download Citation

Sandipan Maity, Shuangqin Liu, Stephane Rouvillois, Gunar Lorenz, and Mattan Kamon "Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770B (7 March 2014); https://doi.org/10.1117/12.2041067

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