Implementation of background scattering variance reduction on the rapid nano particle scanner

Peter van der Walle; Sandro Hannemann; Daan van Eijk; Wouter Mulckhuyse; Jacques C. J. van der Donck

doi:10.1117/12.2048684

2 April 2014 Implementation of background scattering variance reduction on the rapid nano particle scanner

Peter van der Walle, Sandro Hannemann, Daan van Eijk, Wouter Mulckhuyse, Jacques C. J. van der Donck

Proceedings Volume 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII; 905033 (2014) https://doi.org/10.1117/12.2048684
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

The background in simple dark field particle inspection shows a high scatter variance which cannot be distinguished from signals by small particles. According to our models, illumination from different azimuths can reduce the background variance. A multi-azimuth illumination has been successfully integrated on the Rapid Nano particle scanner. This illumination method reduces the variance of the background scattering on substrate roughness. It allows for a lower setting of the detection threshold, resulting in a more sensitive inspection system. By implementing this system the lower detection limit of the scanner was reduced from 59 nm to 42 nm LSE. A next improvement, a change of the inspection wavelength to 193 nm will bring the detection limit to sub 20 nm.

Citation Download Citation

Peter van der Walle, Sandro Hannemann, Daan van Eijk, Wouter Mulckhuyse, and Jacques C. J. van der Donck "Implementation of background scattering variance reduction on the rapid nano particle scanner", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 905033 (2 April 2014); https://doi.org/10.1117/12.2048684

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available