Very low frequency/high sensitivity triaxial monolithic inertial sensor

F. Acernese; R. De Rosa; G. Giordano; R. Romano; F. Barone

doi:10.1117/12.2043595

8 March 2014 Very low frequency/high sensitivity triaxial monolithic inertial sensor

F. Acernese, R. De Rosa, G. Giordano, R. Romano, F. Barone

Proceedings Volume 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014; 90612H (2014) https://doi.org/10.1117/12.2043595
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

This paper describes a new mechanical implementation of a triaxial sensor, configurable as seismometer and/or as accelerometer, consisting of three one-dimensional monolithic FP sensors, suitably geometrically positioned. The triaxial sensor is, therefore, compact, light, scalable, tunable instrument (frequency < 100mHz), with large band (10⁻⁷ Hz − 10Hz), high quality factor (Q > 2500 in air) with good immunity to environmental noises, guaranteed by an integrated laser optical readout. The measured sensitivity curve is in very good agreement with the theoretical ones (10⁻¹²m/√Hz) in the band (0.1 ÷ 10Hz). Typical applications are in the field of earthquake engineering, geophysics, civil engineering and in all applications requiring large band-low frequency performances coupled with high sensitivities.

Citation Download Citation

F. Acernese, R. De Rosa, G. Giordano, R. Romano, and F. Barone "Very low frequency/high sensitivity triaxial monolithic inertial sensor", Proc. SPIE 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014, 90612H (8 March 2014); https://doi.org/10.1117/12.2043595

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