Optical fiber Fabry-Perot pressure sensor based on SU-8

Jiali Zhu; Lihua Dai; Ming Wang; Dongyan Cai; Hua Rong; Sheng Jia; Jingjing You

doi:10.1117/12.2058514

2 June 2014 Optical fiber Fabry-Perot pressure sensor based on SU-8

Jiali Zhu, Lihua Dai, Ming Wang, Dongyan Cai, Hua Rong, Sheng Jia, Jingjing You

Proceedings Volume 9157, 23rd International Conference on Optical Fibre Sensors; 915791 (2014) https://doi.org/10.1117/12.2058514
Event: OFS2014 23rd International Conference on Optical Fiber Sensors, 2014, Santander, Spain

Abstract

A novel optical MEMS pressure sensor with a SU-8, microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry–Perot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation. The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity, sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.

Citation Download Citation

Jiali Zhu, Lihua Dai, Ming Wang, Dongyan Cai, Hua Rong, Sheng Jia, and Jingjing You "Optical fiber Fabry-Perot pressure sensor based on SU-8", Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 915791 (2 June 2014); https://doi.org/10.1117/12.2058514

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