Properties of Si/SiO2 superlattice nanodisc array prepared by nanosphere lithography

Takaya Higa; Ryousuke Ishikawa; Shinsuke Miyajima; Makoto Konagai

doi:10.1117/12.2061472

7 October 2014 Properties of Si/SiO₂ superlattice nanodisc array prepared by nanosphere lithography

Takaya Higa, Ryousuke Ishikawa, Shinsuke Miyajima, Makoto Konagai

Proceedings Volume 9178, Next Generation Technologies for Solar Energy Conversion V; 91780P (2014) https://doi.org/10.1117/12.2061472
Event: SPIE Solar Energy + Technology, 2014, San Diego, California, United States

Abstract

We fabricated nanostructured Si/SiO₂ superlattice films for solar cell appliactions. The Si/SiO₂ superlattice films were fabricated by thermal annealing of a-Si/SiO₂ superlattice films. TEM observations revealed the existence of nanocrystalline Si in the Si layer. This sample showed photoluminescence spectrum with peak energy at around 1.5 eV. It was also found that the defect density in the superlattice was reduced by using forming gas annealing. Applying nanosphere lithography and reactive ion etching, we successfully prepared nanostructures on the surface of the superlattice. We also compared the optical properties with the simulation results using rigorous coupled wave analysis.

Citation Download Citation

Takaya Higa, Ryousuke Ishikawa, Shinsuke Miyajima, and Makoto Konagai "Properties of Si/SiO₂ superlattice nanodisc array prepared by nanosphere lithography", Proc. SPIE 9178, Next Generation Technologies for Solar Energy Conversion V, 91780P (7 October 2014); https://doi.org/10.1117/12.2061472

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available