Processing and error compensation of diffractive optical element

Yunlong Zhang; Zhibin Wang; Feng Zhang; Hui Qin; Junqi Li; Yuying Mai

doi:10.1117/12.2068106

2 September 2014 Processing and error compensation of diffractive optical element

Yunlong Zhang, Zhibin Wang, Feng Zhang, Hui Qin, Junqi Li, Yuying Mai

Proceedings Volume 9280, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 92800G (2014) https://doi.org/10.1117/12.2068106
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Diffractive optical element (DOE) shows high diffraction efficiency and good dispersion performance, which makes the optical system becoming light-weight and more miniature. In this paper, the design, processing, testing, compensation of DOE are discussed, especially the analyzing of compensation technology which based on the analyzing the DOE measurement date from Taylor Hobson PGI 1250. In this method, the relationship between shadowing effect with diamond tool and processing accuracy are analyzed. According to verification processing on the Taylor Hobson NANOFORM 250 lathe, the results indicate that the PV reaches 0.539 micron, the surface roughness reaches 4nm, the step position error is smaller than λ /10 and the step height error is less than 0.23 micron after compensation processing one time.

Citation Download Citation

Yunlong Zhang, Zhibin Wang, Feng Zhang, Hui Qin, Junqi Li, and Yuying Mai "Processing and error compensation of diffractive optical element", Proc. SPIE 9280, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 92800G (2 September 2014); https://doi.org/10.1117/12.2068106

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