Research on the fluid jet polishing in advanced optical fabrication

Tianxiang Sun; Long Sun; Yuqi Jin; Feng Wang; Dianxian Sun

doi:10.1117/12.2069715

6 August 2014 Research on the fluid jet polishing in advanced optical fabrication

Tianxiang Sun, Long Sun, Yuqi Jin, Feng Wang, Dianxian Sun

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92812Q (2014) https://doi.org/10.1117/12.2069715
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Based on the principle of fluid mechanics, this paper presents the technological process of Fluid Jet Polishing. According to the Preston hypothesis, the Fluid Jet Polishing removal amount could be described as a linearity function. The material is removed by the collision and shear action between slurry and work-piece. Comparing to other optical method, kind of abrasive slurry, average diameter of abrasive particle, pressure of abrasive particle, working time, incidence distance and angle of incidence influence the surface figure result and quality of fluid jet polishing. The paper mainly focuses on the influence of abrasive slurry and incidence distance. In the experiment, we take the diameter of Φ120mm, thickness of 20mm, fused silica for example to examine the exactitude principle of the fluid jet polishing. After the final process of fluid jet polishing, the surface figure PV(Peak and Valley) is about 0.046λ(λ=633nm), the RMS (Root-Mean-Square)is about 0.007λ. The result of experiment testifies fluid jet polishing could get high precision.

Citation Download Citation

Tianxiang Sun, Long Sun, Yuqi Jin, Feng Wang, and Dianxian Sun "Research on the fluid jet polishing in advanced optical fabrication", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812Q (6 August 2014); https://doi.org/10.1117/12.2069715

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