Nanosecond laser-induced ablation and laser-induced shockwave structuring of polymer foils down to sub-µm patterns

P. Lorenz; L. Bayer; M. Ehrhardt; K. Zimmer; Lutz Engisch

doi:10.1117/12.2079434

12 March 2015 Nanosecond laser-induced ablation and laser-induced shockwave structuring of polymer foils down to sub-μm patterns

P. Lorenz, L. Bayer, M. Ehrhardt, K. Zimmer, Lutz Engisch

Author Affiliations +

Proceedings Volume 9351, Laser-based Micro- and Nanoprocessing IX; 935119 (2015) https://doi.org/10.1117/12.2079434
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Micro- and nanostructures exhibit a growing commercial interest where a fast, cost-effective, and large-area production is attainable. Laser methods have a great potential for the easy fabrication of surface structures into flexible polymer foils like polyimide (PI). In this study two different concepts for the structuring of polymer foils using a KrF excimer laser were tested and compared: the laser-induced ablation and the laser-induced shock wave structuring. The direct front side laser irradiation of these polymers allows the fabrication of different surface structures. For example: The low laser fluence treatment of PI results in nano-sized cone structures where the cone density can be controlled by the laser parameters. This allows inter alia the laser fabrication of microscopic QR code and high-resolution grey-tone images. Furthermore, the laser treatment of the front side of the polymer foil allows the rear side structuring due to a laserinduced shock wave. The resultant surface structures were analysed by optical and scanning electron microscopy (SEM) as well as white light interferometry (WLI).

Citation Download Citation

P. Lorenz, L. Bayer, M. Ehrhardt, K. Zimmer, and Lutz Engisch "Nanosecond laser-induced ablation and laser-induced shockwave structuring of polymer foils down to sub-μm patterns", Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 935119 (12 March 2015); https://doi.org/10.1117/12.2079434

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