Novel thin film analysis to investigate actual film formation

Kazunori Sakai; Kenji Mochida; Shinichi Nakamura; Tooru Kimura; Kazuhiro Yoshikawa; Naoki Man; Hirofumi Seiki; Masaaki Takeda

doi:10.1117/12.2085717

20 March 2015 Novel thin film analysis to investigate actual film formation

Kazunori Sakai, Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuhiro Yoshikawa, Naoki Man, Hirofumi Seiki, Masaaki Takeda

Author Affiliations +

Proceedings Volume 9425, Advances in Patterning Materials and Processes XXXII; 942522 (2015) https://doi.org/10.1117/12.2085717
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

In order to understand the mechanism of the pattern wiggling distortion and to find control knobs for improving wiggle performance of spin-on carbon hard mask materials, we have developed analysis method of underlayer (UL) films by utilizing XPS depth profiling using Gas Cluster Ion Beam(GCIB-XPS). Differences of distributions of elemental compositions from the surface to the bottom of the processed or un-processed films have been visualized by GCIB-XPS analysis. Besides, these achievements allow us to identify fluoro substitution of oxygen during etching process as the control knob for the pattern wiggling distortion.

Citation Download Citation

Kazunori Sakai, Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuhiro Yoshikawa, Naoki Man, Hirofumi Seiki, and Masaaki Takeda "Novel thin film analysis to investigate actual film formation", Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 942522 (20 March 2015); https://doi.org/10.1117/12.2085717

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available