Development of ultra-precision centering and leveling turntable using aerostatic bearing technology

Maosheng Hou; Yanrong Tian; Lin Ji; Longxiao Wang; Jiaqi Liu; Weiqian Zhao

doi:10.1117/12.2181345

6 March 2015 Development of ultra-precision centering and leveling turntable using aerostatic bearing technology

Maosheng Hou, Yanrong Tian, Lin Ji, Longxiao Wang, Jiaqi Liu, Weiqian Zhao

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463A (2015) https://doi.org/10.1117/12.2181345
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

To perform the ultra-precision centering and leveling operation of large surface under test in optical and mechanical precision measurements, a novel automatic centering and leveling turntable based on the aerostatic bearing technology is developed. In the functional module of centering, a planar aerostatic bearing and two micro-displacement actuators are utilized to achieve centering operation, and in the leveling functional module, a spherical aerostatic bearing, two microdisplacement actuators and a spring pivot are employed to realize the leveling operation. In the paper, the mathematical models of centering and leveling operation are obtained using coordinate transformation, and coupling between the centering and leveling operation is also analyzed. Furthermore, by using distance-measuring interferometer and autocollimator, the resolutions of centering and leveling operation are measured. Finally, errors of the centering and leveling operation are analyzed and the performance evaluation of the turntable is given. The experimental results show that, with 50Kg load, the leveling operation resolution is better than 1.2″; leveling operation range is ±1^°; the centering operation resolution is better than 0.05μm; centering operation range is about ±5mm. The developed turntable can satisfy the requirements of ultra-precision, high resolution, wide range, frictionless, high load stiffness, stabilization and small driving force.

Citation Download Citation

Maosheng Hou, Yanrong Tian, Lin Ji, Longxiao Wang, Jiaqi Liu, and Weiqian Zhao "Development of ultra-precision centering and leveling turntable using aerostatic bearing technology", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463A (6 March 2015); https://doi.org/10.1117/12.2181345

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