Method for traceable resolution calibration of the laser feedback displacement sensor

Yingchun Ding; Runtao Tan; Yidong Tan; Shulian Zhang

doi:10.1117/12.2186135

17 July 2015 Method for traceable resolution calibration of the laser feedback displacement sensor

Yingchun Ding, Runtao Tan, Yidong Tan, Shulian Zhang

Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95240H (2015) https://doi.org/10.1117/12.2186135
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

A method is presented in this paper for resolution calibration of the laser feedback displacement sensor based on Fabry-Perot (F-P) high-order feedback cavity using a conventional feedback system to measure the same displacement with it simultaneously. By calibrating the ratio of the intensity modulated curves gotten by this two different systems, the accurate optical resolution of the integrated system can be obtained. Without using any other subdivision method, the optical resolution can be about 11nm, which is traceable to light wavelength. By adding 20 times electric subdivision, the final resolution of this system is about 0.55nm. The integrated system can fit the requirement of the industrial application, and can also be used for nanometrology.

Citation Download Citation

Yingchun Ding, Runtao Tan, Yidong Tan, and Shulian Zhang "Method for traceable resolution calibration of the laser feedback displacement sensor", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240H (17 July 2015); https://doi.org/10.1117/12.2186135

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