Design and fabrication of nano-scale single crystal diamond cutting tool by focused ion beam (FIB) milling

Seung-Yub Baek

doi:10.1117/12.2189568

17 July 2015 Design and fabrication of nano-scale single crystal diamond cutting tool by focused ion beam (FIB) milling

Seung-Yub Baek

Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95241R (2015) https://doi.org/10.1117/12.2189568
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

Micro/nanoscale diamond cutting tools used in ultra-precision machining can be fabricated by precision grinding, but it is hard to fabricate a tool with a nanometric cutting edge and complex configurations. High-precision geometry accuracy and special shapes for microcutting tools with sharp edges can be achieved by FIB milling. Because the FIB milling method induces much smaller machining stress compared with conventional precision grinding methods. In this study, the FIB milling characteristics of single-crystal diamond were investigated, along with methods for decreasing the FIB-induced damage on diamond tools. Lift-off process method and Pt(Platinum) coating process method with FIB milling were investigated to reduce the damage layer on diamond substrate and quadrilateral-shaped single-crystal diamond cutting tool with cutting edge width under 500 nm were obtained.

Citation Download Citation

Seung-Yub Baek "Design and fabrication of nano-scale single crystal diamond cutting tool by focused ion beam (FIB) milling", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95241R (17 July 2015); https://doi.org/10.1117/12.2189568

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available