3D optical metrology and super-resolution microscopy with structured illumination based on QXGA (2048x1536) resolution

Henning Molsen

doi:10.1117/12.2184774

22 June 2015 3D optical metrology and super-resolution microscopy with structured illumination based on QXGA (2048×1536) resolution

Henning Molsen

Author Affiliations +

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952506 (2015) https://doi.org/10.1117/12.2184774
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Structured Illumination has gained wide use in 3D optical metrology systems and 3D Super-Resolution Microscopy (SRM). Both applications use a spatial light modulator (SLM) to project a series of complex images onto the surface of a device-under-test [1] and into biological samples, respectively [2, 3]. In 3D optical metrology a camera-based inspection system is used to assess these images and calculate an accurate 3D profile. In 3D-SRM, the fluorescent emission from specific markers is detected to reconstruct biological structures below 250 nm. This paper outlines the features of Forth Dimension Displays’ new 3.1 MPixel SLM and driver solution and describes design aspects for its application in structured illumination.

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Henning Molsen "3D optical metrology and super-resolution microscopy with structured illumination based on QXGA (2048×1536) resolution", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952506 (22 June 2015); https://doi.org/10.1117/12.2184774

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