PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
CaF2 is one of the foremost optical materials used in ArF excimer laser optics. Surface quality of optically finished CaF2 plays an important role in the component’s lifetime. Several techniques were employed to assess surface quality of optically finished CaF2 in terms of top surface and subsurface damage, resulting in subsurface-damagefree CaF2. UV light and plasma interaction with CaF2 surfaces were investigated. The results were discussed in terms of surface roughness and cleanness associated with surface finishing and optical coatings.
Jue Wang
"Surface assessment and mitigation of DUV optics", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Y (24 September 2015); https://doi.org/10.1117/12.2190684
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Jue Wang, "Surface assessment and mitigation of DUV optics," Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Y (24 September 2015); https://doi.org/10.1117/12.2190684