Paper
28 September 2015 Enhancing sensitivity of long-period gratings by combined fiber etching and diamond-like carbon nano-overlay deposition
Mateusz Śmietana, Marcin Koba, Predrag Mikulic, Wojtek J. Bock
Author Affiliations +
Proceedings Volume 9634, 24th International Conference on Optical Fibre Sensors; 963456 (2015) https://doi.org/10.1117/12.2195214
Event: International Conference on Optical Fibre Sensors (OFS24), 2015, Curitiba, Brazil
Abstract
This work presents an application of reactive ion etching (RIE) followed by diamond-like carbon (DLC) nano-overlay deposition using radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method for effective tuning of the refractive-index (RI) sensitivity of long-period gratings (LPGs). Both etching and deposition take place within one process. Combination of both plasma-based processes allows for well controlled tuning of the LPG sensorial response up to its operation at both dispersion turning point (DTP) of higher order cladding modes and mode transition regime. As a result of processing, RI sensitivity can be enhanced up to over 12,000 nm/RIU per single resonance in narrow RI range (1.3344-1.3355) and over 2000 nm/RIU in broader RI range (1.34-1.356).
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mateusz Śmietana, Marcin Koba, Predrag Mikulic, and Wojtek J. Bock "Enhancing sensitivity of long-period gratings by combined fiber etching and diamond-like carbon nano-overlay deposition ", Proc. SPIE 9634, 24th International Conference on Optical Fibre Sensors, 963456 (28 September 2015); https://doi.org/10.1117/12.2195214
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Cited by 3 scholarly publications.
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KEYWORDS
Etching

Reactive ion etching

Cladding

Carbon

Plasma enhanced chemical vapor deposition

Sensors

Refractive index

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