SLM based semiconductor maskwriter

Steffen Diez; Achim Jehle

doi:10.1117/12.2197024

4 September 2015 SLM based semiconductor maskwriter

Steffen Diez, Achim Jehle

Author Affiliations +

Proceedings Volume 9661, 31st European Mask and Lithography Conference; 966104 (2015) https://doi.org/10.1117/12.2197024
Event: 31st European Mask and Lithography Conference, 2015, Eindhoven, Netherlands

Abstract

The high-end semiconductor mask fabrication is dominated by e-beam technology. But still more than 50% of all semiconductor masks are produced by laser writers. The current laser writers are based on the same technology that was used 25 years ago. They are reliable and fast but not very economical. Heidelberg Instruments has developed a new economical and fast laser writer based on the latest technologies.

Citation Download Citation

Steffen Diez and Achim Jehle "SLM based semiconductor maskwriter", Proc. SPIE 9661, 31st European Mask and Lithography Conference, 966104 (4 September 2015); https://doi.org/10.1117/12.2197024

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