Holographic fabrication of 3D photonic crystal templates with 4, 5, and 6-fold rotational symmetry using a single beam and single exposure

David Lowell; David George; Jeffery Lutkenhaus; Usha Philipose; Hualiang Zhang; Yuankun Lin

doi:10.1117/12.2213606

14 March 2016 Holographic fabrication of 3D photonic crystal templates with 4, 5, and 6-fold rotational symmetry using a single beam and single exposure

David Lowell, David George, Jeffery Lutkenhaus, Usha Philipose, Hualiang Zhang, Yuankun Lin

Author Affiliations +

Proceedings Volume 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX; 97590H (2016) https://doi.org/10.1117/12.2213606
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

A method of fabricating large-volume three-dimensional (3D) photonic crystal and quasicrystal templates using holographic lithography is presented. Fabrication is accomplished using a single-beam and single exposure by a reflective optical element (ROE). The ROE is 3D printed support structure which holds reflecting surfaces composed of silicon or gallium arsenide. Large-volume 3D photonic crystal and quasicrystal templates with 4-fold, 5-fold, and 6-fold symmetry were fabricated and found to be in good agreement with simulation. Although the reflective surfaces were setup away from the Brewster's angle, the interference among the reflected s and p-polarizations still generated bicontinuous structures, demonstrating the flexibility of the ROE. The ROE, being a compact and inexpensive alternative to diffractive optical elements and top-cut prisms, facilitates the large-scale integration of holographically fabricated photonic structures into on-chip applications.

Citation Download Citation

David Lowell, David George, Jeffery Lutkenhaus, Usha Philipose, Hualiang Zhang, and Yuankun Lin "Holographic fabrication of 3D photonic crystal templates with 4, 5, and 6-fold rotational symmetry using a single beam and single exposure", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590H (14 March 2016); https://doi.org/10.1117/12.2213606

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