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5 March 2022 Calcination: the enabler of next-gen additive inorganic 3D structuring
Darius Gailevicius, Greta Merkininkaite, Simas Sakirzanovas, Mangirdas Malinauskas
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Proceedings Volume PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; PC120120T (2022) https://doi.org/10.1117/12.2608928
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
Here, we describe progress made in the field of additive manufacturing “unchained” via post processing of composites. Hybrid prepolymers are known for their usefulness in forming complex micro-/nano- devices using various forms of laser lithography. They contain metal-oxide constituents and are special for their sol-gel form, relatively low shrinkage and high laser damage threshold (LIDT) properties during/after exposure. Yet, there is one more new property that can be induced due to their special composition: present metal and oxide elements can form into a purely inorganic glass or ceramic lattices in a heat-treatment process without the loss of the previous geometry. This area of research recently gained rapid traction and is coming into fruition as an enabler of full 3D nanophotonics, micro-optics, medical devices and more. This is due to fact that new materials can be produced with a simple process, resulting in increased refractive index and LIDT, together with inertness.
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Darius Gailevicius, Greta Merkininkaite, Simas Sakirzanovas, and Mangirdas Malinauskas "Calcination: the enabler of next-gen additive inorganic 3D structuring", Proc. SPIE PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, PC120120T (5 March 2022); https://doi.org/10.1117/12.2608928
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KEYWORDS
Crystals
Glasses
Heat treatments
Lithography
Metals
Photonics
Refractive index
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