Presentation
3 October 2022 Optically driven nano-motors designed by machine learning
Author Affiliations +
Abstract
Nano-motors driven by linearly polarized light were fabricated and measured experimentally. These structures include a plasmonic rotor embedded into a SiO2 body. The rotor geometry was optimized to reach the strongest torque using a convolutional neural network connected to a deep convolution generative adversarial network. The most promising nanostructures were fabricated with a multistep process that included ion beam etching of the rotor, followed by embodiment in SiO2. Careful optimization enabled the realization of sub-20 nm features. The nano-motors were transferred to a fluidic chamber for optical characterization, demonstrating rapid rotation speeds.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mintae Chung, Karim Achouri, and Olivier J. F. Martin "Optically driven nano-motors designed by machine learning", Proc. SPIE PC12198, Optical Trapping and Optical Micromanipulation XIX, PC121980M (3 October 2022); https://doi.org/10.1117/12.2633430
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KEYWORDS
Machine learning

Optical design

Plasmonics

Etching

Ion beams

Nanolithography

Silica

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