Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet lithography pellicle

Yongkyung Kim; Kihun Seong; Donggi Lee; Seungchan Moon; Hyun-Mi Kim; Hyeongkeun Kim; Seul-Gi Kim; Jinho Ahn

doi:10.1117/12.2643003

11 November 2022 Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet lithography pellicle

Yongkyung Kim, Kihun Seong, Donggi Lee, Seungchan Moon, Hyun-Mi Kim, Hyeongkeun Kim, Seul-Gi Kim, Jinho Ahn

Author Affiliations +

Proceedings Volume PC12292, International Conference on Extreme Ultraviolet Lithography 2022; PC122920H (2022) https://doi.org/10.1117/12.2643003
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

As the EUV source power increases, the industry requires new pellicle materials with high EUV transmittance and chemical stability under EUV irradiation environments. We demonstrate a molybdenum carbide (Mo2C) membrane as a new pellicle material which exhibits high EUV transmittance (≥ 88 %). The stability of Mo2C membranes was confirmed under high temperature and hydrogen plasma. Through this study, the possibility of Mo2C as a candidate material for EUV pellicle was confirmed.

Conference Presentation

Citation Download Citation

Yongkyung Kim, Kihun Seong, Donggi Lee, Seungchan Moon, Hyun-Mi Kim, Hyeongkeun Kim, Seul-Gi Kim, and Jinho Ahn "Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet lithography pellicle", Proc. SPIE PC12292, International Conference on Extreme Ultraviolet Lithography 2022, PC122920H (11 November 2022); https://doi.org/10.1117/12.2643003

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