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12 August 2023 Ion-beam-induced nanostructuring on titanium surfaces
Jens Bauer, Hannaneh Hosseini, Gregor Dornberg, Frank Frost
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Proceedings Volume PC12622, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials VI; PC126220R (2023) https://doi.org/10.1117/12.2673111
Event: SPIE Optical Metrology, 2023, Munich, Germany
Abstract
The nanostructuring on titanium surfaces is studied by low-energy argon ion irradiation. The surfaces are analysed by EBSD for grain orientation mapping, SEM for surface imaging, WLI and AFM for topography characterization, XPS and ToF-SIMS for chemical surface analysis. Under normal incidence specific nanoripple structures are formed, whereas the morphology is defined by the crystallographic conditions only. A characteristic relation between grain orientation and ripple size is elaborated. Experiments on co-deposition with Al, C, Cu, Fe, and Si indicate that Fe impurities influence nanostructuring. The effect of inclined ion incidence shows an overlay between orientation-dependent and process geometry-related structure formation.
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Jens Bauer, Hannaneh Hosseini, Gregor Dornberg, and Frank Frost "Ion-beam-induced nanostructuring on titanium surfaces", Proc. SPIE PC12622, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials VI, PC126220R (12 August 2023); https://doi.org/10.1117/12.2673111
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KEYWORDS
Titanium
Ion beams
Ions
Nanostructuring
Chemical analysis
Crystals
Biomedical applications
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