CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12648 > Article
Presentation
5 October 2023 Piezoelectric MEMS-empowered dynamic metasurfaces
Fei Ding
Author Affiliations +
Proceedings Volume PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI; PC126480U (2023) https://doi.org/10.1117/12.2675900
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
Plasmonic metasurfaces, i.e., ultrathin arrays of engineered metallic meta-atoms, have attracted increasing attention due to their unprecedented capabilities of molding classical light. Despite significant progress, most existing metadevices to date are passive and lack real-time dynamic modulation post-fabrication. Therefore, it is highly desirable to realize tunable metasurfaces with functionalities actively controlled by applying external stimuli, which are promising for more intelligent and adaptive systems. In this talk, I will talk about a piezoelectric MEMS-empowered dynamic metasurface platform for active wavefront shaping by electrically varying the gap between the MEMS mirror and the designed optical metasurface layer. In particular, I will introduce how to achieve full-range birefringence control and tunable chirality.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Fei Ding "Piezoelectric MEMS-empowered dynamic metasurfaces", Proc. SPIE PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI, PC126480U (5 October 2023); https://doi.org/10.1117/12.2675900
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Birefringence
Intelligence systems
Microelectromechanical systems
Mirrors
Modulation
Nanophotonics
Optical design
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top