The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements

Robert Eklund; Mikael L. Wahlsten; Mats O. Rosling; Martin Glimtoft; Peter Henriksson; Anders Svensson; Fredric Ihren; Youngjin Park

doi:10.1117/12.2687582

22 November 2023 The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements

Robert Eklund, Mikael L. Wahlsten, Mats O. Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park

Author Affiliations +

Proceedings Volume PC12751, Photomask Technology 2023; PC127510H (2023) https://doi.org/10.1117/12.2687582
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

Mycronic assessed the market for Laser Mask Writers and concluded that there was an opportunity if the product was reliable, had high uptime, was cost-efficient to compete with fully depreciated writers and was sustainable including having a small carbon footprint. To achieve this, the platform needed to be modern allowing to support flexibility in a rapidly changing environment and enable the possibility to develop new functionalities to meet future customer demands to last long, while keeping the development cost down. This paper describes the process and the decisions behind the SLX writer and how it has been received by the market. The future of the SLX will also be discussed and how key parameters like resolution and registration will be improved for future products.

Conference Presentation

Citation Download Citation

Robert Eklund, Mikael L. Wahlsten, Mats O. Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, and Youngjin Park "The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements", Proc. SPIE PC12751, Photomask Technology 2023, PC127510H (22 November 2023); https://doi.org/10.1117/12.2687582

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available