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Phase-Shift Masks: Alternating
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p79
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Abstract
This excerpt gives a succinct explanation of Phase-Shift Masks: Alternating.
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KEYWORDS
Phase shifts
Etching
Photomasks
Transmittance
Lithography
Mask making
Photoresist materials
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