Technical Issues in Processing of CVD ZnS

Book: Chemical Vapor Deposited Zinc Sulfide

Author(s): John S. McCloy, Randal W. Tustison

Published: 2013

https://doi.org/10.1117/3.1001953.ch2

Abstract

In order to appreciate the complexities associated with chemical vapor deposition of ZnS and the subsequent heat treatment of the material, one must first examine the characteristics and reactions of the main components of the system (Zn, S, H2S, and Ar). Trace components in the gas system (e.g., H2O, H2, and O2) that provide alternative reaction paths must be considered as well.