Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

Lin Liu; Jingjing Sun; Elaine Lin; Huikai Xie; Lei Wu

doi:10.1117/1.3533323

1 February 2011 Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

Lin Liu, Jingjing Sun, Elaine Lin, Huikai Xie, Lei Wu

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Journal of Biomedical Optics, Vol. 16, Issue 2, 026006 (February 2011). https://doi.org/10.1117/1.3533323

Abstract

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ±16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Lin Liu, Jingjing Sun, Elaine Lin, Huikai Xie, and Lei Wu "Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias," Journal of Biomedical Optics 16(2), 026006 (1 February 2011). https://doi.org/10.1117/1.3533323

Published: 1 February 2011

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