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21 September 2016 In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Alexander Mai, Christopher Bunce, Rene Hübner, Daniel Pahner, Ulrike A. Dauderstädt
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 3, 035502 (September 2016). https://doi.org/10.1117/1.JMM.15.3.035502
Abstract
Micromirror based spatial light modulators (SLMs) developed by the Fraunhofer Institute for Photonic Microsystems are well established in microlithography applications. Serving, e.g., as reflective, programmable photomasks in deep-UV mask writers, they enable highly flexible pattern generation. During operation, the micromirror bow significantly impacts contrast and the resolvable feature size of generated patterns. In some situations, MEMS micromirrors tend to change their bow during laser irradiation. A test regime including a characterization unit for the in situ analysis of MEMS micromirror topology has been developed to measure the bow change under various irradiation conditions. Experiments in which SLMs were irradiated by a 1-kHz, 248-nm pulse laser revealed that mirror bowing can occur in both directions (concave and convex). The bowing direction is dependent upon the applied irradiation parameters such as pulse-energy density, pulse number, and the deposited energy. Sustained irradiation at energy densities exceeding a certain limit can potentially become a limiting factor for the resolvable feature sizes of the patterns generated and, therefore, for the usable SLM lifespan.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Alexander Mai, Christopher Bunce, Rene Hübner, Daniel Pahner, and Ulrike A. Dauderstädt "In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 035502 (21 September 2016). https://doi.org/10.1117/1.JMM.15.3.035502
Published: 21 September 2016
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Cited by 6 scholarly publications.
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KEYWORDS
Mirrors
Micromirrors
Laser irradiation
Spatial light modulators
Microelectromechanical systems
Transmission electron microscopy
Oxides
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