Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2

Chengyang Wang; Jiandong Jin; Yuling Li; Wenbo Ding; Mingjun Dai

doi:10.1117/1.JMM.16.1.015002

6 January 2017 Design and fabrication of a MEMS-based gas sensor containing WO₃ sensitive layer for detection of NO₂

Chengyang Wang, Jiandong Jin, Yuling Li, Wenbo Ding, Mingjun Dai

Author Affiliations +

Funded by: “863” High Technology Project

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 1, 015002 (January 2017). https://doi.org/10.1117/1.JMM.16.1.015002

Abstract

A gas sensor based on microelectromechanical systems (MEMS) technology containing a WO3 sensitive layer was designed, simulated, and fabricated. The gas sensor consists of a silicon substrate, a platinum microheater, gold interdigitated electrodes, and a WO3 sensitive layer. The active area with dimensions of 0.4 mm×0.4 mm is located at the center of a sensor (3 mm×3 mm). The experimental results show that the microheater provided heating for the WO3 sensitive layer at low power consumption and accurate temperature control. At a power consumption of only 40 mW, the temperature reached 319°C at the center of the MEMS platform with uniform heating. In addition to that, the above mentioned gas sensor exhibited a high response to NO2 with optimized sensitivity recorded at the working temperature of 170°C. With 10 ppb of NO2, the response of the sensor could reach up to 5.8 and the power consumption is 17.2 mW.

Citation Download Citation

Chengyang Wang, Jiandong Jin, Yuling Li, Wenbo Ding, and Mingjun Dai "Design and fabrication of a MEMS-based gas sensor containing WO₃ sensitive layer for detection of NO₂," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 015002 (6 January 2017). https://doi.org/10.1117/1.JMM.16.1.015002

Received: 21 June 2016; Accepted: 12 December 2016; Published: 6 January 2017

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