Reduced dielectric charging RF MEMS capacitive switch

Khushbu Mehta; Deepak Bansal; Anuroop Bajpai; Ashudeep Minhas; Amit Kumar; Maninder Kaur; Prem Kumar; Kamaljit Rangra

doi:10.1117/1.JMM.17.4.045001

14 December 2018 Reduced dielectric charging RF MEMS capacitive switch

Khushbu Mehta, Deepak Bansal, Anuroop Bajpai, Ashudeep Minhas, Amit Kumar, Maninder Kaur, Prem Kumar, Kamaljit Rangra

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 4, 045001 (December 2018). https://doi.org/10.1117/1.JMM.17.4.045001

Abstract

The presence of dielectric charging in a switch causes stiction and drift in pull-in voltage. A design to alleviate charging issues for RF MEMS switches is proposed. An RF MEMS capacitive switch has been fabricated and characterized. Measured pull-in of the switch is <20 V and pull-up voltage is 17 V with a switching time of 78 μs. Insertion loss and isolation of the switch are measured by varying RF power from 0 to 15 dBm at room temperature. Insertion loss and isolation of the switch are better than 0.1 and 17 dB, respectively. Resonant frequency of the device is 8.4 kHz. The switch has completed 600 million cycles.

Citation Download Citation

Khushbu Mehta, Deepak Bansal, Anuroop Bajpai, Ashudeep Minhas, Amit Kumar, Maninder Kaur, Prem Kumar, and Kamaljit Rangra "Reduced dielectric charging RF MEMS capacitive switch," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(4), 045001 (14 December 2018). https://doi.org/10.1117/1.JMM.17.4.045001

Received: 7 August 2018; Accepted: 27 November 2018; Published: 14 December 2018

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