Open Access
24 March 2021 32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry
Sangyoon Han, Jeremy Beguelin, Lane Ochikubo, John Jacobs, Tae Joon Seok, Kyoungsik Yu, Niels Quack, Chang-Kyu Kim, Richard S. Muller, Ming C. Wu
Author Affiliations +
Abstract

We report on a 32  ×  32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 V and the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Sangyoon Han, Jeremy Beguelin, Lane Ochikubo, John Jacobs, Tae Joon Seok, Kyoungsik Yu, Niels Quack, Chang-Kyu Kim, Richard S. Muller, and Ming C. Wu "32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry," Journal of Optical Microsystems 1(2), 024003 (24 March 2021). https://doi.org/10.1117/1.JOM.1.2.024003
Received: 16 December 2020; Accepted: 6 March 2021; Published: 24 March 2021
Lens.org Logo
CITATIONS
Cited by 10 scholarly publications and 1 patent.
Advertisement
Advertisement
KEYWORDS
Switches

Directional couplers

Silicon photonics

Waveguides

Microelectromechanical systems

Switching

Silicon

RELATED CONTENT


Back to Top