Technique for rapid inspection of hermetic seals of microelectronic packages using shearography

Y.Y. Hung; Dahuan Shi

doi:10.1117/1.601656

1 May 1998 Technique for rapid inspection of hermetic seals of microelectronic packages using shearography

Y.Y. Hung, Dahuan Shi

Optical Engineering, Vol. 37, Issue 5, (May 1998). https://doi.org/10.1117/1.601656

One possible failure of microelectronic devices is due to leakage resulting from an imperfect hermetical seal in microelectronic packages such as microchips. This malfunction is often experienced in automobiles in which the electronic devices are exposed to hostile environments. Traditional leak-testing methods are very time consuming. A shearographic technique for rapid evaluation of hermetic seals is presented. The package under test is stressed by an external pressure change. With the pressure change maintained, the lid of a perfectly sealed package will remain deformed while a leaky package will not hold the deformation, which can be monitored by shearography. This leak testing is fast and practical and can be extended to testing pharmaceutical packages, food packages, etc.

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Y.Y. Hung and Dahuan Shi "Technique for rapid inspection of hermetic seals of microelectronic packages using shearography," Optical Engineering 37(5), (1 May 1998). https://doi.org/10.1117/1.601656

Published: 1 May 1998

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